Basic Information

• intelliSCANde III：第三代内置 iDRIVE 数字驱动一体化振镜
• 14：通光孔径 14mm
• 532NM：光学镀膜适配 532nm 绿色可见光激光器
  Product Type: 2-Axis Digital Servo Galvanometer Laser Scan Head
  产品类型：双轴一体化数字伺服激光振镜扫描头
  配套控制系统：SCANLAB RTC5 / RTC6 PCIe / 以太网控制卡、laserDESK 激光加工软件
  适配光源：532nm 绿光纳秒 / 皮秒固体激光器、光纤绿光激光器
  配套光学配件：f-theta 场镜（焦距 100/160/210mm 可选）、同轴视觉相机转接模块
  供电规格：标准 24VDC 直流供电

Module Product Introduction

Core Functions 核心功能

1. 内置 iDRIVE 数字伺服驱动一体化设计，无需外置驱动盒，降低设备布线与电磁干扰
2. Integrated iDRIVE digital servo drive, no external driver box, reduce wiring & EMI interference
3. 532nm 专用高损伤阈值光学镀膜，适配连续 / 脉冲绿光激光器，最大耐受 10W 平均激光功率
4. 532nm dedicated high LIDT optical coating, compatible with CW/pulse green laser, max 10W average power
5. 14mm 大通光孔径，±14° 光学扫描角度，搭配 f-theta 场镜实现大面积高精度加工幅面
6. 14mm beam aperture, ±14° optical scan angle, large marking field with f-theta lens
7. 16 位定位分辨率，定位精度＜1μm，重复定位误差＜±2μm，适配半导体、玻璃微米级微加工
8. 16-bit positioning resolution, accuracy <1μm, repeatability <±2μm for wafer & glass micromachining
9. Sharp-Edge 动态伺服调谐，跟踪误差仅 0.15ms，高速划线无拖尾、图形畸变小
10. Sharp-Edge servo tuning, 0.15ms tracking error, high-speed marking without trailing distortion
11. 双数字通讯接口：XY2-100 Enhanced / SL2-100，兼容全系 RTC5/RTC6 控制卡，支持高速 40kHz 点位更新
12. Dual digital interfaces XY2-100 Enhanced / SL2-100, match RTC5/RTC6 cards, up to 40kHz point ｕｐｄａｔｅ rate
13. 整机硬件全自诊断，实时监测振镜零点偏移、伺服温度、通讯断线，故障信号上传控制系统
14. Full hardware self-diagnosis, monitor zero offset, servo temp & communication loss, upload fault to controller
15. 可拓展配件：同轴视觉监控模块、varioSCAN Z 轴 3D 扫描组件、水冷散热套件，适配 3D 激光加工与高功率连续工况
16. Expandable options: coaxial vision adapter, varioSCAN Z-axis 3D module, water cooling kit for high-power continuous processing