产品类型介绍 Module Type Introduction
0100-71267 为标准单宽 PMC 夹层板卡，遵循 IEEE1386.1 总线规范，是半导体晶圆制程设备专用精密信号处理组件。板载 32 位 RISC 协处理器，搭载 8 路独立隔离采集通道，专门采集反应腔压力、温度、射频、气体流量传感器信号，完成高精度时序同步与逻辑运算，输出控制信号驱动阀门、射频电源执行薄膜工艺，可直接插接 VME 总线载板，免改造插拔替换。0100-71267 is a single-width standard PMC mezzanine card compliant with IEEE1386.1 bus specification, a precision signal processing component dedicated to semiconductor wafer processing equipment. Equipped with 32-bit RISC co-processor and 8 independent isolated acquisition channels, it collects chamber pressure, temperature, RF and gas flow sensor signals, completes high-precision timing synchronization and logic calculation, and outputs control signals to drive valves and RF power supplies for thin-film processes. It can be directly plugged into VMEbus carrier boards for ｄｒｏｐ-in replacement without modification.
核心功能 Core Functions
- 8 通道独立高精度信号采集，支持模拟量、脉冲信号同步采样，适配腔室各类工艺传感器
- 8-channel independent high-precision signal acquisition, supports synchronous sampling of analog and pulse signals, compatible with various process sensors in process chambers
- 板载 32 位 RISC 协处理器，本地实时运算，降低主控 CPU 负载，保障薄膜沉积工艺一致性
- Onboard 32-bit RISC co-processor for local real-time calculation, reduces main CPU load and ensures consistent thin-film deposition process
- PMC 标准总线通讯，66MHz PCI 总线速率，与 VME 载板高速双向数据交互
- Standard PMC bus communication with 66MHz PCI bus speed, high-speed bidirectional data exchange with VME carrier boards
- 全通道硬件隔离保护，抑制射频、等离子强电磁干扰，避免采集信号漂移失真
- Full-channel hardware isolation protection to suppress strong electromagnetic interference from RF and plasma, prevent signal drift and distortion
- 内置硬件故障自诊断，实时监测通道短路、芯片异常、总线通讯丢失，前端接口输出故障告警
- Built-in hardware self-diagnosis, real-time monitoring of channel short circuit, chip failure and bus communication loss, fault alarm output via front interface
- 即插即用 FRU 备件设计，完全匹配原厂安装孔位与引脚定义，更换后无需重新工艺认证
- Plug-and-play FRU spare part design, fully matched with original mounting holes and pin definitions, no process requalification required after replacement
电气参数 Electrical Specifications
总线标准：IEEE1386.1 PMC / PCI 66MHzBus Standard: IEEE1386.1 PMC / PCI 66MHz通道数量：8 路独立隔离采集通道Channel Quantity: 8 independent isolated acquisition channels板载存储：128~256MB 板载 DDR 内存，2~256MB 电子盘存储程序Onboard Storage: 128~256MB onboard DDR memory, 2~256MB disk-on-chip for program storage系统供电：由 VME 载板背板供电，无需独立外接电源System Power: Powered by VME carrier backplane, no separate external power supply硬件防护：过压、短路、静电 ESD、射频 EMI 多级防护Hardware Protection: Multi-stage protection against overvoltage, short circuit, ESD and RF EMI脉冲采样频率：最高 50kHz 高速脉冲捕捉Pulse Sampling Frequency: Max 50kHz high-speed pulse capture
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